Layer termination from ellipsometric info is totally integrated into Aeres®. A number of multi-wavelength and spectroscopic ellipsometry solutions can be obtained Using the ion beam sputter deposition process.

In-situ optical checking and Management is out there by Angstrom’s optical monitoring & Command package deal.

An optional cryogenic pump enhances base pressure and pumping velocity and might be isolated from the chamber for the duration of reactive processes with oxygen.

The dimensions, place, and equipment ratio of each Earth are optimized to provide the best possible probable film thickness uniformity.

Our Reticle® ion beam sputter deposition programs are made and engineered to build exact optical movies of the very best purity, density, and balance.

Variable angle levels allow for for incredibly strong slender film procedures. However, amongst its biggest challenges is reproducibility. The substrate is frequently set at an incredibly oblique angle in relation towards the source, plus the films are quite delicate into the precision of this angle.

Angstrom went to wonderful lengths to refine the tolerances of the tilt angle, increasing it from a variation of around an entire diploma on non-Angstrom devices I’ve used to less than 0.

Our exceptional style permits direct or oblique checking of the variable angle stage, eradicating the need for tooling elements or even a witness glass changer. Find out more regarding the Optical Monitoring & Command offer below.

Along with sample rotation, the variable angle phase that is definitely utilized for Reticle® presents for in-constructed angular movement in the deposition flux.

All typical Reticle® platforms consist of yet another gridless conclude-Corridor ion resource with hollow cathode neutralizer.

The deposition ion source is directed towards a cloth target which has been optimized in each dimensions and situation for the expected deposition geometry.

Self-aligned ion optics are configured specifically for the desired deposition High-temperature metal components demands and geometry of your respective system.

Angstrom Engineering’s Reticle® programs give a flip-critical Alternative for those trying to understand any optical design into a superior-efficiency film.

A shuttered QCM Situated close to the substrate presents feedback around the deposition price and Bodily thickness on the expanding film.

Considerate design with the ion beam concentrating optics confines the beam completely to the realm of your concentrate on, doing away with any threat of contamination.